Emeritus Professors

田維誠 Tian, Wei-Cheng

  • Associate Professor, Department of Electrical Engineering, National Taiwan University
  • Ph.D. The U. of Michigan, Ann Arbor, 2003
  • M.S. The U. of Michigan, Ann Arbor, 2000
  • B.S. National Taiwan University, 1995
  • MBA, State University of New York, Albany,, 2009
  • Office : MD 517
  • TEL : +886-2-33669852
  • Email :
  • Office Hour :
  • Website :
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Major Research Areas

Micro and nano analytical & fluidic integrated technologies and devices, MEMS/NEMS enabled transducers and instrumentation for biological, chemical, medical, and industrial applications. Optoelectronics nanotechnology and devices. Advanced CMOS technologies and devices.


Research Summary

 

 

My research interests are on biological, chemical, and medical applications of micro & nano technologies with the focus on the CMOS compatible integration, packaging, and reliability of the micro/nano devices and systems.  The future goal is to improve the accuracy, speed, cost, and ease-of-use of pre-clinical, clinical, and in vitro diagnostics by using micro/nano-enabled systems or instrumentations. The current and future research topics are as follows:

 

1. High performance micro gas chromatography systems for biomedical and energy applications. My research interests are on the novel design/material and packaging of MEMS/NEMS GC components, MEMS/NEMS GC & CMOS integration and reliability, and wireless communication integration of MEM/NEMS GC.

 

2. High throughput, automated micro/nanofluidics-based instrumentations for in vitro diagnostics applications. My research focuses on the novel designs of modular micro/nanofluidics & platform, and packaging & integration for low cost, portable, plug & play instrumentation.

 

3. CMOS-based micro/nano ultrasound transducers, tactile sensors, and systems for clinical and pre-clinical researches. My research interests are on novel design and fabrication of micro/nanomachined ultrasound transducers for highly sensitive and ultra high frequency applications, highly sensitive and integrated tactile sensors, multidisciplinary transduction mechanisms, packaging & reliability of CMOS-based transducers & sensors. 

 

 

 

 

    Dr. Wei-Cheng Tian was born in Taipei, Taiwan. He received the B.S. degree in electrical engineering from the National Taiwan University, Taipei, Taiwan, in 1995, and the M.S. and Ph.D. degrees in electrical engineering and computer sciences from The University of Michigan, Ann Arbor, MI, USA, in 2000 and 2003, respectively. He is currently an Assistant Professor of the Graduate Institute of Electronics Engineering, Graduate Institute of Biomedical Electronics and Bioinformatics, and the Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan.

     

     

     

    During 2003-2009, Dr. Tian worked for GE Global Research at Niskayuna, NY, USA and served as a lead engineer/project leader/principal investigator. His research efforts include development of various Micro/Nano system and technologies for bio/chemical detection & life science applications.  Dr. Tian has not only successfully led and delivered biomedical, industrial, and security programs in Micro/Nano system and technologies within GE, but he lead and won several government grants, including the DARPA program in Micro Gas Chromatography and the DTRA program in the area of integrated sample preparation for high throughput DNA sequencing.  Dr. Tian has been serving as committees in various conferences or consortiums and he currently serves on the program committee of AVS conference-MEMS/ BioMEMS topic group (2006-present). Dr. Tian published and presented 20+ peer-reviewed articles in the major MEMS/NEMS & micro/nanofluidics journals and conferences, owns 20+ issued patents, with 10+ patents pending.  He is the author of one book chapter and edited a book “Microfluidics for Biological Applications”.

     

     

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Journal articles & book chapters

1. Wei-Cheng Tian*, Yu-Hsuan Ho, Chao-Hao Chen and Chun-Yen Kuo, “Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography” , Sensors , Vol. 13; doi:10.3390/s130100865 , 865-874-, Jan. 2013

2. Wei-Cheng Tian*, Yu-Hsuan Ho, and Chao-Hung Chou, “A Photoactivated TiO2 Gas Chromatograph Detector for Diverse Chemical Compounds Sensing at Room Temperature” , IEEE Sensors Journal , Jan. 2013

3. Yu-Hsuan Ho, Ding-Wei Huang, Yung-Ting Chang, Ya-Han Ye, Chih-Wei Chu, Wei-Cheng Tian, Chin-Ti Chen, and Pei-Kuen Wei, “Improve efficiency of white organic light-emitting diodes by using nanosphere arrays in color conversion layers” , Opt. Express , Vol. 20 , pp. 3005-3014-, Jan. 2012

4. Kung-Bin Sung, Ke-Pan Liao, Yen-Lin Liu, Wei-Cheng Tian*, “Development of a nanofluidic preconcentrator with precise sample positioning and multi-channel preconcentration” , Microfluidics and Nanofluidics , Vol. DOI 10.1007/s10404-012-1084-6 , Publish Online-, Oct. 2012

5. Ming-Yee Wong, Wei-Rui Cheng, Mao-Huang Liu, Wei-Cheng Tain, Chia-Jung Lu, “A preconcentrator chip employing micro-SPME array coated with in-situ-synthesized carbon adsorbent film for VOCs analysis” , Talanta , Vol. 101 , 307-313-, Nov. 2012

6. Yu-Hsuan Ho, Yung-Ting Chang, Shun-Wei Liu, Hsiao-Han Lai, Chih-Wei Chu, Chih-I Wu, Wei-Cheng Tian, and Pei-Kuen Wei, “Optimization of Polymer Light Emitting Devices Using TiOx Electron Transport Layers and Prism Sheets” , Organic Electronics , Vol. 13 , 2667-2670-, Nov. 2012

7. W. -C. Tian*, T.H. Wu, C.J. Lu W. R. Chen and H.J. Sheen, “A novel micropreconcentrator employing a laminar flow patterned heater for micro gas chromatography” , J. Micromech. Microeng. , Vol. 22 065014 , May 2012

8. W. -C. Tian, H. K. L. Chan, C. -J. Lu, S. W. Pang, and E. T. Zellers, “Multi-Stage Microfabricated Preconcentrator-Focuser for Micro Gas Chromatography System” , IEEE J. Microelectromech. , Vol. vol. 14 , pp. 498-507-, Jan. 2005

9. Chia-Jung Lu, William H. Steinecker, Wei-Cheng Tian, Michael C. Oborny, Jamie Nichols, Masoud Agah, Joseph A. Potkay, Helena Chan, Jeffrey Driscoll, Richard D. Sacks, Stella W. Pang, Kensall D. Wise, Edward T. Zellers, “First Generation Hybrid MEMS Gas Chromatograph” , Lab on a Chip , Vol. vol. 5 , pp. 1123-1131-, Jan. 2005

10. Zribi, A. Knobloch, W. –C. Tian, S. Goodwin, “Micromachined Resonant Multiple Gas Sensor” , Sens. and Actuators , Vol. vol. 122 , pp. 31-38-, Jan. 2005

11. W. -C. Tian, S. W. Pang, C. -J. Lu, and E. T. Zellers, “Microfabricated Preconcentrator/Focuser for a Micro Scale Gas Chromatograph” , IEEE J. Microelectromech. , Vol. vol. 12 , pp. 264-272-, Jan. 2003

12. W. -C. Tian and S. W. Pang, “Thick and Thermally Isolated Si Microheaters for Microfabricated Preconcentrators” , J. Vac. Sci. Technol. B , Vol. vol. 21 , pp.274-279-, Jan. 2003

13. W. -C. Tian and S. W. Pang, “Freestanding Microheaters in Si with High Aspect Ratio Microstructures” , J. Vac. Sci. Technol. B , Vol. vol. 20 , pp. 1008-1012-, Jan. 2002

14. W. -C. Tian and S. W. Pang, “Released Submicrometer Si Microstructures Formed by One-Step Dry Etching” , J. Vac. Sci. Technol. B , Vol. vol. 19 , pp. 433-438-, Jan. 2001

15. W. -C. Tian, J. W. Weigold, and S.W. Pang, “Comparison of Cl2 and F-Based Dry Etching For High Aspect Ratio Si Microstructures Etched with an Inductively Coupled Plasma Source” , J. Vac. Sci. Technol. B 18 , pp. 1890-1896-, Jan. 2000

16. M. R. Rakhshandehroo, J. W. Weigold, W. -C. Tian, and S. W. Pang, “Dry Etching of Si Field Emitters and High Aspect Ratio Resonators Using an Inductively Coupled Plasma Source” , J. Vac. Sci. Technol. B 16 , pp. 2849-2854-, Jan. 1998

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Conference & proceeding papers:

1. Y. C. Lin, C. J. Hsieh, L. B. Hunag, J. C. Liou, and W.-C. Tian*, “CMOS MEMS Metal-based Tactile Sensors Development” , AVS 59th International Symposium & Exhibition , Tampa, FL, USA , Oct. 2012

2. Y. C. Chen, C. Y. Chang, H. L. Lu, C. J. Lu, and W. -C. Tian*, “A CMOS MEMS Gas Sensor Using Monolayer Protected Gold Nano-Clusters Coating on Three-Dimensional Interdigitated Electrodes” , AVS 59th International Symposium & Exhibition , Tampa, FL, USA , Oct. 2012

3. Y.-S. Tien, P.-C. Ku, F.-Y. Lin, P.-C. Li, L.-H. Lu, and P.-L. Kuo, W.-C. Tian*, “A Low Voltage CMOS-based Capacitive Micromachined Ultrasonic Sensors Development” , IEEE Sensors 2012 , Taipei, Taiwan , Oct. 2012

4. C.-T. Sun, Y.-C. Lin, C.-J. Hsieh, J.-C. Liou, L.-B. Wang, W.-C. Tian*, “A Linear-Response CMOS-MEMS Capacitive Tactile Sensor” , IEEE Sensors 2012 , Taipei, Taiwan , Oct. 2012

5. Yu-Hsuan Ho, Shun-Wei Liu, Hsun Liang, Kuan-Han Ting, Wei-Cheng Tian and Pei-Kuen Wei, “Luminous and Conversion Efficiency Improvement in OLED/OPV Tandem Device with Omnidirectional Antireflection Nanopillars” , SID2012 , Boston, MA, USA , Jun. 2012

6. Yu-Hsuan Ho, Hsun Liang, Yung-Ting Chang, Wei-Cheng Tian, Chih-Wei Chu, Chin-Ti Chen, and Pei-Kuen Wei, “High Efficient Color Conversion Layers for White Organic Light-Emitting Diodes using Polystyrene Nanosphere Monolayers” , SID2012 , Boston, MA, USA , Jun. 2012

7. Y. -L. Liu, K. -P. Liao, K. -B. Sung, and W. -C. Tian*, “Design of nanofluidic preconcentrators using electrical resistive circuit network” , International SEMBA & BioPro , Taichung, Taiwan , Feb. 2012

8. Yu-Hsuan Ho, Chung-Chun Liu, Yung-Ting Chang, Hsun Liang, Wei-Cheng Tian, and Pei-Kuen Wei, “Efficiency and Contrast Enhancement in Organic Light Emitting Device with Omnidirectional Antireflection Nanopillars” , International Display Worrkshop 2011 , Nagoya, Japan , Dec. 2011

9. C. -J. Hsieh, J. -C. Liou, C. -T. Sun, Y. -C. Lin, and W. -C. Tian*, “Novel CMOS MEMS Double Parallel Plate Capacitive Tactile Sensors For Blood Flow Monitoring” , AVS 58th International Symposium & Exhibition , Nashville, YN, USA , Nov. 2011

10. C. -H. Chou, C. -H. Chen, and W. -C. Tian*, T. -H. Chan, and C. -J. Lu, “A Highly Sensitive Nanomachined TiO2 Gas Sensor for Micro Gas Chromatography” , AVS 58th International Symposium & Exhibition , Nashville, YN, USA , Nov. 2011

11. W. -C. Tian*, C. -Y. Kuo, C. -J. Hsieh, H.-L. Lu, and C. -J. Lu, “A Carbon Nanotube Gas Sensor Using CMOS-based Platform” , IEEE Sensors 2011 , Limerick, Ireland , Oct. 2011

12. W.-C. Tian*, H.-J. Sheen, T. -H. Wu, C. -J. Lu, W. -R. Chen and T.-Y. Wei, “Development of a Novel Micropreconcentrator for Micro Gas Chromatograph” , Transducers 2011 , Bejing, China , Jun. 2011

13. K. P. Liao, K.B. Sung, and W. -C. Tian*, “PRECISE SAMPLE POSITIONING FOR MULTIPOINT IMMUNOASSAY USING NANOFLUIDIC PRECONCENTRATOR” , Transducers 2011 , Beijing, China , Jun. 2011

14. Wei-Cheng Tian, “Novel Sensor Design in Discovery and Analysis of Biosignatures and Chemosignatures” , The 2nd Taiwan Biosignatures Workshop , Taipei, Taiwan , Mar. 2011

15. Chao-Hao Chen, Chang-Jung Hsieh, Hsu-Kuei Lin, Ta-Shun Lee, Pei-Hung Chen, Chao-Hung Chou, Chia-Jung Lu, and Wei-Cheng Tian*, “Novel NEMS Gas Detectors for Micro Gas Chromatograph” , AVS 57th International Symposium & Exhibition , Albuquerque, NM, USA , Oct. 2010

16. Wei-Cheng Tian, “Micro/Nano Analytical Systems to Identify Bio Markers for Human Breath Analysis” , Nanotechnology for Medical Devices & Sensing Systems , Taipei, Taiwan , Mar. 2010

17. S. Kennerly, A. Knobloch, N. Chen, W.-C. Tian, M. Shannon, and R. Masel,, “Mass Producible, Multiple Stack, Integrated Micro Gas Chromatography System” , AVS 56th International Symposium & Exhibition , San Jose, CA, USA , Nov. 2009

18. A. Knobloch, J. Cao, S. Kennerly, N. Chen, W.-C. Tian, M. Shannon, and R. Masel, “Thermal Analysis of a Microfluidic Preconcentrator for Portable Micro Gas Analysis Systems” , 2009 ASME IMECE conference , Lake Buena Vista, FL, USA , Nov. 2009

19. Wei-Cheng Tian, “Microfluidics Applications and Challenges” , U. of Michigan Microfluidics Interdisciplinary Workshop , Ann Arbor, MI , Apr. 2008

20. Xuefeng Wang, Ying Fan, Wei-Cheng Tian, Hyon-Jin Kwon, Stacey Kennedy, Glenn Claydon, Andrew May, “Development of air-coupled ultrasound transducers for nondestructive evaluation” , IEEE 21th MEMS , Tucson, AZ , Jan. 2008

21. Xuefeng Wang, Ying Fan, Wei-Cheng Tian, Hyon-Jin Kwon, Stacey Kennedy, Glenn Claydon, Andrew May, “A Micromachined Ultrasound Transducer for Noncontact Nondestructive Evaluation” , 54th International America Vacuum Society , Seattle, WA , Nov. 2007

22. Wei-Cheng Tian, Yu Zhao, Shashi Thutupalli, Atanu Phukan, Christopher Keimel, Oliver Boomhower, Michael Burrell, and Li Zhu, “Microfluidic Disk Sampler for Biological Detection” , 11th International Conf. on Miniaturized Systems for Chemistry and Life Sciences , Paris, France , Oct. 2007

23. Xuefeng Wang, Ying Fan, Wei-Cheng Tian, Hyon-Jin Kwon, Stacey Kennedy, Glenn Claydon, Andrew May, “An Air-Coupled Capacitive Micromachined Ultrasound Transducer for Noncontact Nondestructive Evaluation” , IEEE Sensor , Atlanta, GA , Oct. 2007

24. Wei-Cheng Tian, “High Throughput Microfluidics System for Bio Science Applications” , SUNY Albany seminar , Albany NY , Jan. 2007

25. Wei-Cheng Tian, Yu Zhao, Shashi Thutupalli, Atanu Phukan, Christopher Keimel, Oliver Boomhower, Michael Burrell, and Li Zhu, “Microfluidic Disk Sampler for Biological Detection” , 11th International Conf. on Miniaturized Systems for Chemistry and Life Sciences , Paris, France , Oct. 2007

26. Manvinder Singh, Vamshi Kommareddy, Manoj Kumar, Sivaramanivas Ramaswamy, Ying Fan, James Barshinger, Wei-Cheng Tian, and Kuna Kishore, “Finite Element Analysis of Capacitive Micromachined Ultrasonic Transducer (CMUT) for NDE Applications” , AIP Quantitative Nondestructive Evaluation Conf. , Brunswick, Maine , Mar. 2006

27. W.-C. Tian, “Microsystem Technologies for GE Applications” , 7th MEMS & BioMEMS Conference , San Francisco, CA , Nov. 2005

28. Zribi, W. –C. Tian, A. Knobloch, “High Sensitivity and Broad Dynamic Range MEMS Humidity Sensor” , 52th International America Vacuum Society , Boston, MA , Nov. 2005

29. Zribi, A. Knobloch, W. –C. Tian, G. Schultz, “High Performance MEMS Sensor for Low Dew Point Humidity Detection” , Hilton Head 2004: Solid State Sensor, Actuator, and Microsystesm Workshop , Hilton Head, SC, , Jun. 2004

30. E.T. Zellers, W.H. Steinecker, G.R. Lambertus, M. Agah, C. -J. Lu, H.K.L. Chan, J.A. Potkay, M.C. Oborny, J.M. Nichols, A. Astle, H.S. Kim, M.P. Rowe, J. Kim, L.W. da Silva, J. Zheng, J.J. Whiting, W. –C. Tian, R.D. Sacks, S.W. Pang, M. Kaviany, P.L. Ber, “A Versatile MEMS Gas Chromatograph for Determinations of Environmental Vapor Mixtures” , Hilton Head 2004: Solid State Sensor, Actuator, and Microsystesm Workshop , Hilton Head, SC , Jun. 2004

31. S. Goodwin, A. Zribi, A. Konbloch, W. –C. Tian, G. Schultz, and G. Claydon, “Gas & Vapor Sensing Platform” , Combinatorial & High Throughput Materials Science , Buellton, CA , Jan. 2004

32. C. -J. Lu, W.-C. Tian, W.H. Steinecker, A. Guyon, M. Agah, M.C. Oborny, R.D. Sacks, K.D.Wise, S.W. Pang and E.T. Zellers, “Functionally Integrated MEMS Micro Gas Chromatograph Subsystem” , 7st International Conference on Micro Total Analysis Systems (µTAS’03) , Squaw Valley, CA , Nov. 2003

33. W. -C. Tian, H. K. Chan, S. W. Pang, C. -J. Lu, and E. T. Zellers, “High Sensitivity Three-Stage Microfabricated Preconcentrator-Focuser for Micro Gas Chromatography” , IEEE Transducer’03 , Boston, MA , Jun. 2003

34. W. -C. Tian and S. W. Pang, “Thick and Thermally Isolated Si Microheaters for Preconcentrators” , 49th AVS international Symposium , Denver, CO , Nov. 2002

35. Edward T. Zellers, K. D. Wise, K. Najafi, D. Aslam, R. B. Brown, Q. Y. Cai, J. Driscoll, M. Flynn, J. Giachino, R. Gordenker, M. D. Hsieh, C. T.-C. Nguyen, P. Bergstrom, J. Drelich, C. Friedrich, E. Gamble, M. Kaviany, C. J. Lu, A. Matzger, M. Oborny,, “Determinations of Complex Vapor Mixtures in Ambient Air with a Wireless Microanalytical System: Vision, Progress, and Homeland Security Applications,” , Technical Digest of the IEEE Conference on Technologies for Homeland Security Waltham MA, IEEE , Boston , Nov. 2002

36. W. -C. Tian, S. W. Pang, C. -J. Lu, and E. T. Zellers, “Microfabricated Preconcentrators Using Thick and Thermally Isolated Microheaters in Micro Gas Chromatography” , WIMS ERC seminar series, , Ann Arbor, MI , Apr. 2002

37. W. -C. Tian and S. W. Pang, “Freestanding Microheaters in Si with High Aspect Ratio Microstructures” , 48th AVS international Symposium , San Francisco, CA , Nov. 2001

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Books:

1. Wei-Cheng Tian, “Ch4: Microfabrication of sensor platform and integration of sensing film” , Springer , 978-0-387-36229-8 , 214 , USA, Jan. 2009

2. Wei-Cheng Tiand and Erin Finehout, “Microfluidics for Biological Applications” , Springer , 978-0-387-09479-3 , 416 , USA, Jan. 2009

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Patents:

1. Jun Xie, Shashi Thutupalli, Stacey Joy Kennerly, Wei-Cheng Tian, Erin Jean Finehout, Li Zhu, Oliver Charles Boomhower, “Microfluidic device with vertical injection aperture” , US8029743, Oct. 2011

2. Wei-Cheng Tian et. al., “Injection method for microfluidic chips” , US7927476, Apr. 2011

3. Anis Zribi, Glenn Claydon, Christopher Kapusta, Laura Meyer, Ertugal Berkcan, and Wei-Cheng Tian, “Micro-electromechanical system (MEMS) based current and magnetic field sensor having capacitive sense components” , US7901970, Mar. 2011

4. Scott Duthie, Wei-Cheng Tian, et. al., “Methol and system for selective isolation of target biological molecules in a general prupose system” , 20100029915, Feb. 2010

5. Wei-Cheng Tian, Erin Jean Finehout, Li Zhu, Jun Xie, Shashi Thutupalli, “Injection method for microfluidic chips” , US7740747, Jun. 2010

6. Wei-Cheng Tian, Shashi Thutupalli, Li Zhu, Anthony John Murray, Erin Jean Finehout, Jun Xie, “Electrophoresis system and method” , US7740748, Jun. 2010

7. Robert Gideon Wodnicki, Stacey Joy Kennerly, Wei-Cheng Tian, Kevin Matthew Durocher, David Martin Mills, Charles Gerard Woychik, Lowell Scott Smith, “Methods of making and using integrated and testable sensor array” , US7781238, Aug. 2010

8. Jun Xie, Wei-Cheng Tian, et. al., “Interative staining of biological Samples” , 20090253163, Oct. 2009

9. Anthony Yu-Chung Ku, Steven Alfred Tysoe, Vinayak Tilak, Peter Micah Sandvik, Sergio Paulo Martins Loureiro, James Anthony Ruud, Anis Zribi, Wei-Cheng Tian, “Porous gallium oxide films and methods for making and patterning the same” , US7547953, Jun. 2009

10. Wei-Cheng Tian, et. al., “Injection method for microfluidic chip” , 20090166203, Jul. 2009

11. Jun Xie, Wei-Cheng Tian, et. al., “Injection method for microfluidic chip” , 20090166202, Jul. 2009

12. Wei-Cheng Tian, et. al., “Injection method for microfluidic chip” , 20090166201, Jul. 2009

13. Wei-Cheng Tian, et. al., “Microfluidic deviile with vertical injection aperture” , 20090071832, Mar. 2009

14. Anis Zribi, Wei-Cheng Tian, Yuan-Hsiang Lee, and Min-Yi Shih, “Optofluidic Devices and Methods of Using the Same” , US 7574089, Aug. 2009

15. Scott Smith, David Mills, Jeffrey Fortin, Wei-Cheng Tian, John Logan, “Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane” , US7545012, Jun. 2009

16. Ertugrul Berkcan, Christopher Kapusta, Glenn Claydon, Anis Zribi, Laura Meyer, Wei-Cheng Tian, “MEMS based current sensor using magnetic-to-mechanical conversion and reference components” , US7495430, Feb. 2009

17. K. Subramanian, J. Fortin, and W.-C. Tian, “Method of wet etching vias and articles formed thereby” , US7365437, Apr. 2008

18. Zribi, G. Claydon, C. Kapusta, L. Meyer, E. Berkcan, and W.-C. Tian, “MEMS based current and magnetic field sensor having capacitive sense components” , US7315161, Jan. 2008

19. E. Berkcan, C. Kapusta, G. Claydon, A. Zribi, L. Meyer, and W.-C. Tian, “MEMS based current sensor using magnetic-to-mechanical conversion and reference components” , US7466121, Dec. 2008

20. R. Wodnicki, Wei-Cheng Tian et al., “Integrated sensor arrays and method for making and using such arrays” , US20080296708, Jan. 2008

21. A.Ku, S. Tysoe, V. Tilak, P. Sandvik, S. Loureiro, J. Ruud, A. Zribi, and W. –C. Tian, “Porous gallium oxide films and methods for making and patterning the same” , US20080180209, Jan. 2008

22. E. Berkcan and W. –C. Tian, “Microelectromechanical system sensor and method for using” , US7253615, Aug. 2007

23. W. Lee, D. Mill, S. Claydon, W. Rigby, W. –C. Tian et al., “Isolation of short-circuited sensor cells for high-reliability operation of sensor array” , US7293462, Nov. 2007

24. W. –C. Tian et al., “Capacitive micromachined ultrasound transducer and methods of making the same” , US20070180916, Jan. 2007

25. W. –C. Tian et al., “Capacitive micromachined ultrasound transducer and methods of making the same” , JP2007215177, Jan. 2007

26. J. Gui, W. –C. Tian et al, “Rotation-based microsampler, system and method of using the same” , US20070224591, Jan. 2007

27. W. –C. Tian et al., “High Sensitivity Capacitive Micromachined Ultrasound Transducer” , DE102007007178, Jan. 2007

28. Zribi, W.-C. Tian et al., “Miniaturized multi-gas and vapor sensor devices and associated methods of fabrication” , US7104113, Dec. 2006

29. Zribi, W.-C. Tian et al., “Miniaturized multi-gas and vapor sensor devices and associated methods of fabrication” , EP1687617, Jan. 2006

30. K. Subramanian, J. Fortin, and W.-C. Tian, “Method of wet etching vias and articles formed thereby” , US7101789, Sep. 2006

31. S. L. Smith, D. Mills, J. Fortin, and W. -C. Tian, “Capacitive Micromachined Ultrasound Transducer Fabricated With Epitaxial Silicon Membrane” , US7037746, Jan. 2006

32. E. Berkcan, C. Kapusta, G. Claydon, A. Zribi, L. Meyer, and W.-C. Tian, “MEMS based current sensor using magnetic-to-mechanical conversion and reference components” , US7112951, Jan. 2006

33. E. Berkcan, C. Kapusta, G. Claydon, A. Zribi, L. Meyer, and W.-C. Tian, “MEMS based current sensor using magnetic-to-mechanical conversion and reference components” , EP1610142, Jan. 2006

34. W. –C. Tian et al., “High Sensitivity Capacitive Micromachined Ultrasound Transducer” , US20060004289, Jan. 2006

35. W. –C. Tian et al., “High Sensitivity Capacitive Micromachined Ultrasound Transducer” , JP2006020313, Jan. 2006

36. W. –C. Tian; S. W. Pang; T. Zellers, “Microelectromechanical Heating Apparatus And Fluid Preconcentrator Device Utilizing Same” , US6914220, Jan. 2005

37. Zribi, W.-C. Tian et al., “Miniaturized multi-gas and vapor sensor devices and associated methods of fabrication” , WO2005052564, Jan. 2005

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